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1

Laser deposition of YBaCuO on ZrO2-coated sapphire substrates

A.J. Basovich, S.V. Gaponov, L. Jastrabík, M. Jelínek, N.A. Kiselev, E.B. Kluenkov, O.I. Lebedev, L.A. Mazo, L. Soukup, M.D. Strikovskij, V.V. Talanov, A.L. Vasiliev

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 412 KB

english, 1993

2

Free-standing spectral purity filters for extreme ultraviolet lithography

Chkhalo, Nikolay I., Drozdov, Mikhail N., Kluenkov, Evgeny B., Lopatin, Aleksei Ya., Luchin, Valerii I., Salashchenko, Nikolay N., Tsybin, Nikolay N., Sjmaenok, Leonid A., Banine, Vadim E., Yakunin, A

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2012

Language:

english

File:

PDF, 1.70 MB

english, 2012

3

Study of heat induced changes in elastic properties of multilayer Mo/ZrSi 2 membranes

Chkhalo, N.I., Kluenkov, E.B., Lopatin, A.Ya., Luchin, V.I., Salashchenko, N.N., Sjmaenok, L.A., Tsybin, N.N.

Journal:

Thin Solid Films

Year:

2017

Language:

english

File:

PDF, 1.18 MB

english, 2017

4

Switching kinetics in epitaxial PZT thin films

V.Ya. Shur, S.D. Makarov, N.Yu. Ponomarev, V.V. Volegov, N.A. Tonkachyova, L.A. Suslov, N.N. Salashchenko, E.V. Kluenkov

Journal:

Microelectronic Engineering

Year:

1995

Language:

english

File:

PDF, 345 KB

english, 1995

5

Measurements of upper critical field and magnetic field dependence of the microwave resistance of YBaCuO thin film

A.J. Basovich, S.V. Gaponov, E.B. Kluenkov, P.P. Kolokolchikov, U.B. Kudasov, I.M. Markevtsev, A.I. Pavlovskii, V.V. Platonov, O.M. Tatsenko, S.A. Voronov

Journal:

Physics Letters A

Year:

1992

Language:

english

File:

PDF, 382 KB

english, 1992

6

Quadrelliptical reflector based on multilayer structures for the hard X-ray rang

A.A. Akhsakhalyan, A.D. Akhsakhalyan, A.I. Kharitonov, E.B. Kluenkov, V.A. Murav’ev, N.N. Salashchenko

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2005

Language:

english

File:

PDF, 197 KB

english, 2005

7

Manufacturing of XEUV mirrors with a sub-nanometer surface shape accuracy

N.I. Chkhalo, E.B. Kluenkov, A.E. Pestov, V.N. Polkovnikov, D.G. Raskin, N.N. Salashchenko, L.A. Suslov, M.N. Toropov

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

2009

Language:

english

File:

PDF, 241 KB

english, 2009

8

The microstructure and X-ray reflectivity of Mo/Si multilayers

S.S Andreev, S.V Gaponov, S.A Gusev, M.N Haidl, E.B Kluenkov, K.A Prokhorov, N.I Polushkin, E.N Sadova, N.N Salashchenko, L.A Suslov, S.Yu Zuev

Journal:

Thin Solid Films

Year:

2002

Language:

english

File:

PDF, 1.39 MB

english, 2002

9

SIMS study of annealing effect on element distribution in free-standing Al/Si and Zr/ZrSi2multilayer films

M. N. Drozdov, Yu. N. Drozdov, E. B. Kluenkov, V. I. Luchin, A. Ya. Lopatin, N. N. Salashchenko, N. N. Tsybin, L. A. Shmaenok

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2010

Language:

english

File:

PDF, 772 KB

english, 2010

10

Multilayer optics for XUV spectral region: technology fabrication and applications

S. S. Andreev, A. D. Akhsakhalyan, M. A. Bibishkin, N. I. Chkhalo, S. V. Gaponov, S. A. Gusev, E. B. Kluenkov, K. A. Prokhorov, N. N. Salashchenko, F. Schafers, S. Yu. Zuev

Journal:

Central European Journal of Physics

Year:

2003

Language:

english

File:

PDF, 587 KB

english, 2003

11

Multilayer mirror systems to form hard X-ray beams

Anton A. Akhsakhalyan, Aram D. Akhsakhlyan, Alexander I. Kharitonov, Eugenie B. Kluenkov, Vladimir A. Murav’ev, Nikolay N. Salashchenko

Journal:

Central European Journal of Physics

Year:

2005

Language:

english

File:

PDF, 309 KB

english, 2005

12

A stand for a projection EUV nanolithographer-multiplicator with a design resolution of 30 nm

D. G. Volgunov, I. G. Zabrodin, B. A. Zakalov, S. Yu. Zuev, I. A. Kas’kov, E. B. Kluenkov, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Suslov, M. N. Toropov, N. I. Chkhalo

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2011

Language:

english

File:

PDF, 416 KB

english, 2011

13

Mo-based EUV multilayer filters with enhanced thermal stability

M. N. Drozdov, E. B. Kluenkov, A. Ya. Lopatin, V. I. Luchin, A. E. Pestov, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo, L. A. Shmaenok

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2011

Language:

english

File:

PDF, 172 KB

english, 2011

14

Evolution of elemental distribution in free-standing structures of Zr/ZrSi2with MoSi2and ZrSi2protective coatings under annealing

M. N. Drozdov, Yu. N. Drozdov, E. B. Kluenkov, A. Ya. Lopatin, V. I. Luchin, N. N. Salashchenko, N. N. Tsybin, L. A. Shmaenok

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2011

Language:

english

File:

PDF, 246 KB

english, 2011

15

A technological complex for manufacturing of precise imaging optics

S. Yu. Zuev, E. B. Kluenkov, A. E. Pestov, V. N. Poikovnikov, N. N. Salashchenko, L. A. Suslov, M. N. Toropov, N. I. Chkhalo

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2011

Language:

english

File:

PDF, 313 KB

english, 2011

16

Multilayer x-ray mirrors based onW/B4Cwith ultrashort (d= 0.7–1.5 nm) periods

Yu. A. Vainer, E. B. Kluenkov, A. E. Pestov, K. A. Prokhorov, N. N. Salashchenko, A. A. Fraerman, V. V. Chernov, N. I. Chkhalo

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2007

Language:

english

File:

PDF, 224 KB

english, 2007

17

Laser deposited YBaCuO thin films

M. Jelínek, L. Jastrabík, V. Olšan, L. Soukup, M. Šimečková, R. Černý, E. Kluenkov, L. Mazo

Journal:

Czechoslovak Journal of Physics

Year:

1993

Language:

english

File:

PDF, 613 KB

english, 1993

18

Thermal stability of a freestanding EUV filter under long-term vacuum annealing at 700–1000°C

Gusev, S. A., Drozdov, M. N., Kluenkov, E. B., Lopatin, A. Ya., Luchin, V. I., Pariev, D. E., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I., Shmaenok, L. A.

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2012

Language:

english

File:

PDF, 693 KB

english, 2012

19

Possibility for the form correction of X-ray mirrors by reactive ion-beam etching

Akhsakhalyan, A. A., Akhsakhalyan, A. D., Vainer, Yu. A., Volgunov, D. G., Zorina, M. V., Kluenkov, E. B., Kuznetsov, M. I., Salashchenko, N. N., Kharitonov, A. I.

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2012

Language:

english

File:

PDF, 127 KB

english, 2012

20

Applying reactive ionic-beam etching to correcting the shape of X-ray mirrors

A. A. Akhsakhalyan, A. D. Akhsakhalyan, Yu. A. Vainer, D. G. Volgunov, M. V. Zorina, E. B. Kluenkov, L. A. Kaskov, M. I. Kuznetsov, L. M. Nefedov, N. N. Salashchenko, A. L. Kharitonov

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2012

Language:

english

File:

PDF, 150 KB

english, 2012

21

Comparative heat load testing of freestanding multilayer Mo/ZrSi2and Mo/NbSi2

M. N. Drozdov, E. B. Kluenkov…

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2013

Language:

english

File:

PDF, 237 KB

english, 2013

22

Experimental investigation of a local mixed state induced by a small ferroparticle in YBaCuO films

Nozdrin, Yu.N., Mel'nikov, A.S., Tokman, I.D., Vysheslavtsev, P.P., Aladyshkin, A.Yu., Kluenkov, E.B., Vorobiev, A.K.

Journal:

IEEE Transactions on Appiled Superconductivity

Year:

1999

Language:

english

File:

PDF, 437 KB

english, 1999

23

YBaCuO thin films on sapphire up to 2-inch-diameter for microwave applications

Belov, R.K., Drozdov, Y.N., Gaponov, S.V., Gusev, S.A., Klimov, A.Yu., Kluenkov, E., Morozov, K.V., Nozdrin, Y.N., Parafin, A.E., Pavlov, S.A., Reznik, A.N., Talanov, V.V., Varganov, A.V., Volodin, B.

Journal:

IEEE Transactions on Appiled Superconductivity

Year:

1995

Language:

english

File:

PDF, 360 KB

english, 1995

24

Y-Ba-Cu-O thin films composition formation during magnetron sputtering

Drozdov, M.N., Gaponov, S.V., Gusev, S.A., Kluenkov, E.B., Luchin, V.I., Masterov, D.V., Saykov, S.K., Vorobiev, A.K.

Journal:

IEEE Transactions on Appiled Superconductivity

Year:

1999

Language:

english

File:

PDF, 443 KB

english, 1999

25

Surface morphology, microstructure and electrical properties of Y-Ba-Cu-O thin films

Drozdov, Y.N., Gaponov, S.V., Gusev, S.A., Kluenkov, E.B., Nozdrin, Y.N., Talanov, V.V., Vorobiev, A.K.

Journal:

IEEE Transactions on Appiled Superconductivity

Year:

1997

Language:

english

File:

PDF, 483 KB

english, 1997

26

A study of laser-deposited PZT, PLZT, PMN and YBCO thin films

V. Trtik, M. Jelinek, E. B. Kluenkov

Year:

1994

Language:

english

File:

PDF, 428 KB

english, 1994

27

Study of correlation between the microstructure and phase inhomogeneities of Y-Ba-Cu-O epitaxial films and their DC and microwave properties

A. K. Vorobiev, Y. N. Drozdov, S. A. Gusev, V. L. Mironov, N. V. Vostokov, E. B. Kluenkov, S. V. Gaponov, V. V. Talanov

Year:

1999

Language:

english

File:

PDF, 107 KB

english, 1999

28

YBaCuO and ZrO2laser deposition on sapphire using two crossed laser beams

S. Gaponov, J. Gavrilov, M. Jelinek, E. Kluenkov, L. Mazo

Year:

1992

Language:

english

File:

PDF, 167 KB

english, 1992

29

Microstructure and electrical properties of YBCO films

Y. N. Drozdov, S. V. Gaponov, S. A. Gusev, E. B. Kluenkov, Y. N. Nozdrin, V. V. Talanov, B. A. Volodin, A. K. Vorobyev

Year:

1996

Language:

english

File:

PDF, 151 KB

english, 1996

30

SPIE Proceedings [SPIE International Conference on Micro- and Nano-Electronics 2009 - Zvenigorod, Russian Federation (Monday 5 October 2009)] International Conference on Micro- and Nano-Electronics 2009 - Influence of annealing on the structural and optical properties of thin multilayer EUV filters containing Zr, Mo, and silicides of these metals

Chkhalo, N. I., Gusev, S. A., Drozdov, M. N., Kluenkov, E. B., Lopatin, A. Ya., Luchin, V. I., Pestov, A. E., Salashchenko, N. N., Shmaenok, L. A., Tsybin, N. N., Valiev, Kamil A., Orlikovsky, Alexand

Year:

2010

Language:

english

File:

PDF, 630 KB

english, 2010

31

Thin film multilayer filters for solar EUV telescopes

Chkhalo, N. I., Drozdov, M. N., Kluenkov, E. B., Kuzin, S. V., Lopatin, A. Ya., Luchin, V. I., Salashchenko, N. N., Tsybin, N. N., Zuev, S. Yu.

Journal:

Year:

2016

Language:

english

File:

PDF, 741 KB

english, 2016

32

Preparation and investigation of laser ablated PZT, PLZT and PbMg 1/3 Nb 2/3 O 3 (PMN) ferroelectric films

Jelínek, M., Brádler, J., Trtík, V., Soukup, L., Gaponov, S. V., Suslov, L. A., Kluenkov, E. B., Drozdov, Yu. N., Shaplygina, T. A., Trepakov, V. A.

Journal:

Year:

1994

Language:

english

File:

PDF, 554 KB

english, 1994

33

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Manufacturing and investigation of objective lens for ultrahigh resolution lithography facilities

Chkhalo, Nikolay I., Kluenkov, Evgeniy B., Pestov, Aleksey E., Raskin, Denis G., Salashchenko, Nikolay N., Toropov, Mikhail N., Valiev, Kamil A., Orlikovsky, Alexander A.

Year:

2012

Language:

english

File:

PDF, 287 KB

english, 2012

34

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Multilayer Zr/Si filters for EUV lithography and for radiation source metrology

Bibishkin, M. S., Chkhalo, N. I., Gusev, S. A., Kluenkov, E. B., Lopatin, A. Y., Luchin, V. I., Pestov, A. E., Salashchenko, N. N., Shmaenok, L. A., Tsybin, N. N., Zuev, S. Y., Valiev, Kamil A., Orlik

Year:

2012

Language:

english

File:

PDF, 1.04 MB

english, 2012

35

Excimer laser ablation and properties of chromium doped strontium titanate thin films

Jelínek, M., Jastrabík, L., Smunt, F., Trtík, V., Studniča, V., Olšan, V., Kluenkov, E. B., Trepakov, V. A.

Journal:

Year:

1994

Language:

english

File:

PDF, 413 KB

english, 1994

36

SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Investigation of fluorescence on wavelength 13.5 nm of x-ray tube for nanolithographer

Chkhalo, N., Zabrodin, I., Kas'kov, I., Kluenkov, E., Pestov, A., Salashchenko, N., Valiev, Kamil A., Orlikovsky, Alexander A.

Year:

2012

Language:

english

File:

PDF, 157 KB

english, 2012

37

SPIE Proceedings [SPIE SPIE Optics + Optoelectronics - Prague, Czech Republic (Monday 18 April 2011)] EUV and X-Ray Optics: Synergy between Laboratory and Space II - Freestanding multilayer films for application as phase retarders and spectral purity filters in the soft x-ray and EUV ranges

Chkhalo, N. I., Hudec, René, Pina, Ladislav, Drozdov, M. N., Gusev, S. A., Kluenkov, E. B., Lopatin, A. Ya., Luchin, V. I., Salashchenko, N. N., Shmaenok, L. A., Tsybin, N. N., Volodin, B. A.

Year:

2011

Language:

english

File:

PDF, 519 KB

english, 2011

38

Current status and development prospects for multilayer X-ray optics at the Institute for Physics of Microstructures, Russian Academy of Sciences

Akhsakhalyan, A. D., Kluenkov, E. B., Lopatin, A. Ya., Luchin, V. I., Nechay, A. N., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Toropov, M. N., Tsybin, N. N., Chkhalo,

Journal:

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

Year:

2017

Language:

english

File:

PDF, 1.48 MB

english, 2017